What are MEMS Sensors? Its Types and Applications

This tutorial will teach us about the fascinating technology known as MEMS. We’ll look at some fundamental MEMs ideas as well as various MEMS applications, specifically MEMS sensors. We will also learn about various MEMS Sensor kinds and some of their current uses.

What is MEMS?

Micro Electro Mechanical Systems is also known as MEMS. It is a technology used to create microscale devices such as sensors, transducers, actuators, gears, pumps, switches, and others.

Using a technique known as Microsystems Technology, MEMS are tiny integrated devices that combine mechanical, electrical, and electronic components to fulfil a single functional requirement (MST).

MEMS technology is viewed as an advancement of conventional integrated circuit (IC) production. The primary distinction between MEMS and conventional IC manufacturing technology (VLSI) is that MEMS allows for the fabrication of both mechanical and electrical components, including gears, springs, beams, and inductors in addition to capacitors and inductors. You can only create conductors, insulators, diodes, and transistors using conventional IC technology.

These MEMS-based devices are typically only a few micrometers in size (between 1 to 100 micrometers).

Another crucial thing to keep in mind is that, with the aid of cutting-edge IC manufacturing technology, MEMS is an integration of both active and passive components into a single silicon substrate. The passive components are the passive electronic systems and the passive mechanical systems, whereas the active components are the sensors and actuators.

The mechanical system, which consists of Gears, Cranks, Bearings, etc., is developed using Micromachining Process whereas the electronic system, which consists of signal processing circuits like Amplifier, ADC, Filters, etc., is built using IC Fabrication Process.

What are MEMS Sensors?

One of the key elements of the digital world of today are sensors. There should be a bridge between the analogue world and the digital electronics since all computing and processing are done on digital signals. The employment of sensors to observe the temporal effects of analogue physical characteristics and provide meaningful information fills in this gap (to the computer).

The modern definition of a sensor can be difficult to understand at times, but put simply, a sensor is a device with fundamental sensing components that detect physical quantities like temperature or humidity and convert them into electrical signals. A signal processing device, such as an amplifier, filter, or ADC, or a combination of these components, is also a component of a sensor.

In terms of MEMS Sensors, a Micromachined Microsensor, or simply a MEMS Sensor, is a Sensor that has been designed and produced using MEMS Technology.

If you recall, we utilized an MPU6050 IC to control our HAND GESTURE CONTROLLED ROBOT. It has a Digital Motion Processor, a 3-axis Gyroscope, and a 3-axis Accelerometer. It is made with the use of MEMS technology.

Different Types of MEMS Sensors

The automotive sector is one of the main users of MEMS technology. Many sensors are used in modern autos, and the majority of them are MEMS-based components. The MEMS Sensors used in contemporary cars are listed below.

• Accelerometers – For Electronic Stability Control and Airbag deployment.
• Inertial Measurement Units or IMU (they are a combination of MEMS Accelerometer and MEMS Gyroscope) – For measuring yaw, pitch and roll for autonomous driving.
• Magnetometer – For direction used in navigation.
• Pressure and Inertial Sensor – For braking control.
• Pressure Sensor – Tire Pressure Monitoring System.
• Airflow Sensor – Air intake monitoring.
• Fuel Sensor – Fuel Level Indicator.
• Impact and Crash Sensor – Impact detection and Airbag deployment.
• MEMS Microphone – For communication and Noise Cancellation.
• Temperature Sensor – For Automatic Climate Control and Engine Temperature Monitoring.
• There are many other MEMS based devices for various applications.

Applications

MEMS sensors are already employed in a wide range of applications, including managing grippers, robots, autos, and other vehicles as well as controlling and handling equipment. Modern inkjet printers, color projectors, display systems, clocks, and scanning devices all contain these sensors.

Different sensors, including pressure, temperature, vibration, and chemical sensors, are produced using MEMS technology.

Some of the MEMS Sensors that are frequently found in automobiles, helicopters, airplanes, drones, and ships include accelerometers, gyroscopes, e-Compasses, and others.

Some of the sectors of applications of MEMS-based Sensors are mentioned below:

• Automotive
• Chemical and Pharmaceutical
• Aircraft
• Industrial Automation and Manufacturing
• Defense, Space and Aeronautical
• Environmental and Health Sciences
• Computing and Communications
• Consumer Products

Conclusion

I hope all of you understand the basics of MEMS Sensors, its type and applications. We MATHA ELECTRONICS will be back soon with more informative blogs soon.